Abstract
The YBa2Cu3Ox (YBCO) films patterned to a bridge shape were locally irradiated by a focused electron beam of 4 nm diameter in a transmission electron microscope. Electron beam irradiation allowed controlled reduction of the critical currents and raised the normal state resistance of the films. Irradiated films exhibited Shapiro steps when exposed to microwave irradiation. It was found that irradiated films functioned as Josephson junctions.
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