Abstract
Abstract This paper presents the fabrication of an integrated optoelectronic circuit consisting of a waveguide and photodetector. Fabrication of the waveguides took place in a RIBE system with 1·5 sccm CH4/H2 (60:40) and 0·5 sccm Ar. Wet etching defines the photodetector regions. The detection of surface damage is minimal, using a novel differential optical reflectance technique.
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