Fabrication of individually seeded nanowire arrays by vapour–liquid–solid growth

Abstract

We report on a method of synthesizing arrays of individually seeded nanowires. Anelectron beam lithography and metal lift-off method was used to pattern InP(111)Bsubstrates with catalysing gold particles. Vertical nanowire arrays were then grown from the gold particles, using metal–organic vapourphase epitaxy. The lithographic nature of the method allows individual control over eachnanowire. Possible applications for such deterministic and uniform arrays include producingarrays of nanowire devices, two-dimensional photonic band gap structures and fieldemission displays, amongst others.