Abstract
Ag ions with four kinds of energies were implanted into silica to doses of 5×1016 and 1×1017ions/cm2, respectively. Hollow Ag nanoclusters were observed in the 1×1017Ag+ions/cm2 implanted samples with energies of 150 and 200keV. The evolution of hollow nanoclusters during annealing was carried out by in situ transmission electron microscopy observation. The energy dependence for the formation of hollow nanoclusters is studied. A potential mechanism for the formation of irradiation-induced nanovoids in nanoclusters is discussed.
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