Abstract
Hollow fibers for transmitting high-power CO 2 laser light are fabricated by metal organic chemical vapor deposition (MOCVD) method. A dielectric film of metal oxides, such as Y 2 O 3 , ZrO 2 , and Cu 2 O is deposited inside a Ag-coated glass capillary by using metal acetylacetonate as a precursor. The waveguide coated by Cu 2 O with the bore diameter of 700 μm showed the lowest attenuation of 0.8 dB/m for CO 2 laser light. The metal oxide films deposited by MOCVD have high chemical and heat resistivity. Therefore the hollow fiber coated with these materials is suitable for high power laser applications under a severe environment.
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