Abstract

We fabricated a high performance electron beam for the vacuum electronic devices with carbon nanotube (CNT) cathode. For the vacuum electronic devices application, a structure of cold cathode should be highly adhere on cathode substrate and endure a resistive heating during electron emission. For fabrication of stable electron beam, we optimized the CNT emitters and the triode structure. The structural properties of CNT emitters could be enhanced with functional coating on CNT surfaces. In this study, we developed silicon functional coating technique on CNT emitters and enhanced and stable electron emission with the coating.

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