Fabrication of high temperature moiré grating and its application

Abstract

The fabrication technique of high temperature moiré grating has been presented, which combines thermal nanoimprint process method and high temperature transferring technique. And the quality of grating was evaluated by analyzing its configuration through the Atomic Force Microscope (AFM) images. From the analysis, it was found that the optimal depth of grating will cause different stress condition in the process of vacuum deposition, and thicker deposited metal film on the grating may enhance the oxidation resistant ability. However, with the increase of the thickness of the metal film, cracks may occur in the film, In order to avoid this mechanical failure, the optimization of the depth of grating was performed. The optimized depth was obtained by analyzing the stress intensity using Finite Element Method (FEM). In order to verify the reliability of high temperature grating, the tensile experiment of high temperature alloy (GH3030) at 650°C was carried out, and the experimental results demonstrated that fabricated high temperature grating was feasible.