Abstract
This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as-grown CMCs were inserted between two PDMS layers. The pressure sensor exhibits piezo-resistivity changes in response to mechanical loading using a load cell system. The yields of the growth of CMCs at a catalyst proportion of Fe:Sn = 95:5 reach 95%. Experimental results show that the sensor achieves a high sensitivity of 0.93%/kPa from the CMC yield of 95%. The sensitivity of the pressure sensor increases with increasing yield of CMCs. The demonstrated pressure sensor shows the advantage of high sensitivity and is suitable for mass production.
Highlights
Pressure sensors, which are widely applied in automation equipment, robot arms, touch panels, and cell phones, have been developed on the basis of piezoresistive, piezoelectric, and capacitive principles [1,2,3]
The PDMS was dropped on as-grown carbon microcoils (CMCs)/carbon nanofibers (CNFs) in a cast to control the thickness of the PDMS layer
These results suggest that the optimal mass ratio of Fe-Sn was 95:5
Summary
Pressure sensors, which are widely applied in automation equipment, robot arms, touch panels, and cell phones, have been developed on the basis of piezoresistive, piezoelectric, and capacitive principles [1,2,3]. Various techniques using the Micro Electro Mechanical System (MEMS) processes and nanomaterials have been reported, such as the carbon nanotube pressure sensor [4,5] and carbon fiber pressure sensor [6]. These techniques require complex manufacturing processes and exhibit low piezoresistance sensitivity, less than 0.09%/kPa. Recently, carbon microcoils (CMCs) have been developed due to their unique 3-dimensional (3D) helical/spiral structure. The sensitivity of the sensor was affected by the ratio of as-grown CMCs/carbon nanofibers (CNFs) This technique facilitates an increase in the sensitivity of a flexible pressure sensor using 3D helical CMCs and PDMS
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
