Abstract
We report a technique to fabricate whispering gallery mode microdisk resonators using femtosecond laser micromachining and a heat reflow process to improve the optical quality of the resonator. The fabricated resonators have suppressed higher order modes with a measured Q-factor as high as 7.2×106. The described fabrication process, which relies on material non-thermal laser ablation, offers the ability to fabricate microresonators using a wide variety of materials of nearly any dimensional size or shape.
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