Fabrication of gold-doped crystalline-silicon nanomembrane-based wearable temperature sensor

Abstract

Wearable temperature sensors with high thermal sensitivity are required for precise and continuous body temperature monitoring. Here, we present a protocol for fabricating a thin, stretchable, and ultrahigh thermal-sensitive wearable sensor based on gold-doped crystalline-silicon nanomembrane (SiNM). We provide detailed steps of gold doping technique to SiNM and fabrication processes for gold-doped crystalline-SiNM based wearable temperature sensor. For complete details on the use and execution of this protocol, please refer to Sang etal. (2022).1.