Fabrication of glasses in the TeO2-WO3 system using plasma chemical oxidation of tellurium and tungsten chlorides

Abstract

The possibility of producing tungsten-telluride glasses using plasma chemical vapor phase deposition using corresponding chlorides as source components has been experimentally demonstrated. Homogeneous layers in the entire vitrification range of the TeO2-WO3 system have been obtained. The concentration of metal impurities in the deposited layers does not exceed n × 10−4 wt % that is comparable with their concentration in the source chlorides. Using the techniques of differential scanning calorimetry and Raman scattering, it has been shown that, at the melting stage, the layers obtained are vitreous and comparable in their characteristics with the glasses fabricated using traditional techniques.