Fabrication of GaAs Orientation Template Substrates for Quasi-Phasematched Guided-Wave Nonlinear Optics

Abstract

Quasi-phasematched nonlinear optical frequency conversion in waveguides is a flexible and efficient technique for generating visible and infrared radiation from low-power near infrared diode lasers. While demonstrated conversion efficiencies have been high1-3, a formidable difficulty remains in the path of widespread implementation of waveguide frequency conversion techniques. The separately fabricated diode lasers and nonlinear waveguides must be aligned together to sub-micron tolerances with high yield and excellent long-term reliability. Monolithic integration of diode lasers and nonlinear devices onto the same substrate is an attractive solution to this problem, particularly if the nonlinear devices are fabricated in semiconductor materials.