Fabrication of flexible highly reflective micromirrors arrays for sunlight reflectors

Abstract

Micromirrors have applications in optical displays, optical switches and biological imaging systems. In this paper, we developed the notion of flexible micromirrors solar light reflecting system. This proposed fabrication enables the system to select rays from the scene's light field based on the needs of the application at hand. Such a system achieves high reflective metal mirrors from 1064 nm – the near infrared (NIR) – down to 150 nm – the vacuum ultraviolet (VUV) – spectral region and solves problems with many micromirror designs including size limitations and fabrication difficulty. This flexibility is achieved using an array of micro-mirrors fabricated using inverse chemical vapour deposition and photolithography.