Abstract
Pb(Zr0.52Ti0.48)O3 (PZT) and SrBi2Ta2O9 (SBT) films have been fabricated onto Pt/Ti/SiO2/Si substrates with a new chemical solution deposition (CSD) technique, in which PbZrO3(PZ)/PbTiO3(PT) and SrTa2O6(ST)/Bi2O3(B) precursors were spin-coated and heated individually. Polycrystalline PZT and SBT films were formed through the reactions between the multilayers at relative low temperatures, without post-annealing. With the aid of AFM, an island-column hybrid growth mode and a nucleus growth mode were suggested for the PZT and SBT film growths, respectively. However, it was found that the deposition orders affected substantially the microstructure of SBT films. This study suggests that the processing temperatures for the ferroelectric film fabrications can be reduced with alternate deposition of multilayers.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
