Fabrication of embedded microball lens in PMMA with high repetition rate femtosecond fiber laser.

Abstract

Embedded microball lenses with superior optical properties function as convex microball lens (VMBL) and concave microball lens (CMBL) were fabricated inside a PMMA substrate with a high repetition rate femtosecond fiber laser. The VMBL was created by femtosecond laser-induced refractive index change, while the CMBL was fabricated due to the heat accumulation effect of the successive laser pulses irradiation at a high repetition rate. The processing window for both types of the lenses was studied and optimized, and the optical properties were also tested by imaging a remote object with an inverted microscope. In order to obtain the microball lenses with adjustable focal lengths and suppressed optical aberration, a shape control method was thus proposed and examined with experiments and ZEMAX® simulations. Applying the optimized fabrication conditions, two types of the embedded microball lenses arrays were fabricated and then tested with imaging experiments. This technology allows the direct fabrication of microlens inside transparent bulk polymer material which has great application potential in multi-function integrated microfluidic devices.