Fabrication of dome-shaped PZT-epoxy actuator using modified solvent and spin coating technique

Abstract

Thick film two phase, 0–3 composite PZT-epoxy dome-shaped structures have been fabricated for the first time using a modified solvent and spin coating technique, where a PZT and ethanol solution was dispersed in an epoxy matrix, combined with a hardener, spin coated onto stainless steel sheets, and poled at ~2.2 kV/mm. The electro-mechanical performances of the films were investigated as a function of volume fraction of PZT. The volume fraction of PZT was varied from 0.1 to 0.7 and the piezoelectric coefficients d 31 and d 33 , and the capacitance, C, were measured, and used to calculate the effective dielectric constants. The values for d33, d31, C and dielectric constant were 1.06 pC/N, 0.74 pC/N, 6.0 pF and 76.1 respectively, at 70 % volume fraction of PZT. The surface topography and morphology were examined via AFM and SEM. The piezoelectric strain coefficients, capacitance and effective dielectric constant increased with increasing PZT content, in addition to the surface roughness. Agglomeration of PZT particles and surface crevices were observed on sample surfaces, which are most likely due to surface tension and air bubbles formed during the mixing process.