Fabrication of dielectric optical waveguides on AlTiC sliders for heat-assisted magnetic recording

Abstract

In this paper we show the feasibility to integrate waveguide optics into magnetic recording sliders using current recording head manufacturing techniques. Thin film planar waveguides were deposited on ceramic substrates and structured to yield rectangular waveguides positioned on the front face of recording sliders that fly at 20 nm spacing over a glass disk. The thin film waveguide is equipped with a diffraction grating that allows light to be coupled into the waveguide and directed towards the air bearing surface. Optical properties of selected waveguide stacks are presented together with photographs of etched waveguide structures on AlTiC sliders.