Abstract
A simple technique to obtain an array of hollow submicrometric titanium oxide pipes is described. Initially, a submicrometric structure is formed in a positive photoresist by holographic exposure, followed by the deposition of the titanium oxide film and the removal of the photoresist by an appropriate solvent. These structures may be useful as waveguides for x-ray and neutron capillary optics.
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Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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