Fabrication of continuous diffractive optical elements using a fast tool servo diamond turning process

Abstract

Continuous diffractive optical elements (CDOEs) can be used for laser-beam reshaping, pattern generation and can help reduce large angle scattering. Lithography, the method for the production of binary diffractive surfaces, is not suitable for fabrication of CDOEs. Diamond turning using fast tool servo, on the other hand, is a non-cleanroom method for generating continuous microstructures with high precision and efficiency. In this paper, an algorithm for designing CDOEs is introduced. The moving least-squares (MLS) method is then used to obtain the local fitting equation of the diffractive surface. Based on the MLS fitting equation, the selection of diamond cutting tool geometries (including the tool nose radius, rake angle and clearance angle) is discussed and a tool nose radius compensation algorithm is included. This algorithm is a general method for the diamond turning of complex surfaces that can be represented by a point cloud. Surface measurements and diffractive patterns generated on test samples have shown that continuous diffractive surfaces were successfully machined. In the future, CDOEs can be machined on an optical mold surface for high-volume industrial production using methods such as injection molding.