Abstract

We report on the fabrication of a co-axial tip for application to scanningprobe energy loss spectroscopy (SPELS). The device consists of a 23.3 µm tall tip on a 76 µm tall mesa with amultilayer Si/Au/HfO2/Au structure;the outer Au and HfO2 layers are stripped from the apex of the tip. The inner Au layer is used as a field emittinglayer and the outer Au layer is grounded to screen the electric field between the tip and thesubstrate. The co-axial tip shows comparable field emission characteristics to electrochemicallyetched tungsten tips. The SPELS spectra of graphite obtained with the new tips showπ andσ plasmon peaks and intense secondary electron emission peaks. It is anticipated that suchco-axial tips will present a significant advantage for future angular resolved SPELSmeasurements.

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