Abstract
Thin films of Nd-doped and pure CeO 2 have been fabricated on quartz glass and MgO(100) single crystal substrates by an electron beam evaporation method. The deposition and crystal growth behavior has been investigated using X-ray diffractometry and atomic force microscope. The CeO 2 thin film showed preferred (111) orientation on MgO(100) above 373 K and (110) orientation on quartz glass above 673 K. The electrical conductivity of 40 mol% NdO 1.5-doped CeO 2 thin film shows almost identical value with those of sintered ceramics with the activation energy of 0.91 eV.
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