Abstract
We obtained blue photoluminescence from tantalum oxide films deposited by radio-frequency sputtering after annealing. Intense photoluminescence having a peak wavelength of around 430 nm was observed from a sample annealed at 600degC for 20 min. Tantalum oxide films that emit blue light can be useful as materials for novel active optical devices utilizing Ta2O5/SiO2 multilayered photonic crystals.
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