Fabrication of arched MEMS electric contactor with Cu-based carbon nanofibre composite film

Abstract

A novel method for fabricating arched micro-electronic-mechanical system (MEMS) electric contactors with carbon nanofibre (CNF) composite film is presented. The arched structure is helpful for operational stability and is fabricated using ultraviolet-Lithografie Galvanoformung Abformung technology and a special melting photoresist process. Cu-based CNF composite film is used as a contact electrode and fabricated on the arched structure. During the whole electroplating process, all the elements for fabricating Cu-based CNF film must be dipped in the ultrasonic agitation environment to avoid agglomeration of CNFs on the surface of the composite film. The fabricated contactor shows good electrical charateristics and excellent mechanical properties. The whole process needed only three masks with the potential of integration of other miniaturised components.