Abstract
The fill factor for hydrogenated amorphous silicon solar cells was improved by using an intrinsic layer with lower space-charge density, and by using a p/i interface layer with a small amount of hydrogen evolved in the low-temperature region. Using these improvements as well as a high-performance p-type layer for the fabrication of solar cells resulted in a high conversion efficiency. The fabrication and properties of solar cells are presented.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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