Abstract
The modification of thin Teflon AF ® films by He 1 ion irradia- tion was investigated. As an integrated optical measurement technique, leaky-mode spectroscopy has been applied, and an increase of Dn58 310 23 for the real part of the refractive index has been found in the irradiated surface region of the film. The irradiated films can be regarded as a bilayer system consisting of a layer with low refractive index and a layer with high refractive index. The latter can be used as an optical waveguide with a substrate of unmodified Teflon AF. In addition, a de- crease of the initial film thickness, an increase in UV absorption, and no significant increase in absorption of near-infrared light were found. © 2001 Society of Photo-Optical Instrumentation Engineers. (DOI: 10.1117/1.1385331) Subject terms: ion irradiation; fluorpolymer; optical waveguide; leaky-mode spec- troscopy.
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