Abstract
We first report on the fabrication of all solid-state thin-film battery (TFB) using a LiNiO 2 cathode. The LiNiO 2 film is grown by radio frequency magnetron reactive sputtering using a synthesized LiNiO 2 target in a [O 2 /(Ar + O 2 )] ratio of 0.1. The LiNiO 2 is then rapid thermal annealed at 700°C for 10 min in an oxygen atmosphere. X-ray diffraction results show that the as-deposited amorphous LiNiO 2 becomes crystallized when rapid thermal annealed at 700°C. It is shown that the TFB made with the rapid thermal annealed LiNiO 2 cathode (1.13 μm thick) exhibits fairly stable cyclability with a capacity of 60 μAh. These findings indicate that the rapid thermal annealed LiNiO 2 can be a promising cathode material for the fabrication of high performance TFBs.
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