Abstract
We have constructed an integrated superfluid oscillator using various silicon processing techniques, including micromachining and electron beam lithography. This device has the advantage of a very small internal volume (0.72 mm/sup 3/). This makes it insensitive to spurious external acoustic noise which has limited the performance of larger experiments. We have tested the performance of this device in two configurations, one with a single micro-aperture and another with an additional fine tube. Both configurations demonstrate macroscopic quantum phenomena in superfluid /sup 4/He at low temperatures (0.25 K<T<2.2 K) and have been used to study these effects in detail.
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