Abstract
PTFE is widely used as a microwave and millimeter-wave material. However, it is known that PTFE is a difficult material to cut at high precision by conventional machining, or even by laser cutting or electrical discharge machining. It has been reported that PTFE microstructures can be fabricated by direct exposure to synchrotron radiation. A metallic waveguide is one of effective media guiding a millimeter- and submillimeter-wave because of the advantage of low loss. In this paper, the SR direct etching of PTFE is introduced and a trial fabrication of millimeter-wave PTFE waveguide is attempted.
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