Abstract
This paper presents the fabrication and the tests of a novel micro-mass spectrometer fabricated by micro-machining and emission test of hot electron for ionization. A micro-mass spectrometer consists of a micro-ion source and a micro-ion separator. The micro-ion source consists of a hot filament and grid electrodes. Electrons emitted from a hot filament are to ionize some sample molecules. The ions are accelerated to an ion detector by an electric field of the ion separator. Mass can be analyzed by using the time-of-fight depending on the mass-to-charge ratio. The current of hot electron emission from the hot filament is measured for various input voltages and the ion separation is tested for acetone.
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