Abstract
Water contamination is a main inducement of human diseases. It is an important step to monitor the water quality in the water distribution system. Due to the features of large size, high cost, and complicated structure of traditional water determination sensors and devices, it is difficult to realize real-time water monitoring on a large scale. In this paper, we present a multi-parameter sensor chip, which is miniature, low-cost, and robust, to detect the pH, conductivity, and temperature of water simultaneously. The sensor chip was fabricated using micro-electro-mechanical system (MEMS) techniques. Iridium oxide film was electrodeposited as the pH-sensing material. The atomic ratio of Ir(III) to Ir(IV) is about 1.38 according to the X-ray photoelectron spectroscopy (XPS) analysis. The pH sensing electrode showed super-Nernstian response (−67.60 mV/pH) and good linearity (R2 = 0.9997), in the range of pH 2.22 to pH 11.81. KCl-agar and epoxy were used as the electrolyte layer and liquid junction for the solid-state reference electrode, respectively, and its potential stability in deionized water was 56 h. The conductivity cell exhibited a linear determination range from 21.43 to 1.99 , and the electrode constant was 1.566 cm−1. Sensitivity of the temperature sensor was 5.46 . The results indicate that the developed sensor chip has potential application in water quality measurements.
Highlights
Protection of human health is one of the goals of social development, in which water plays an extremely important role
Water quality can be assessed from various aspects, through measuring many parameters, including pH, oxidation reduction potential (ORP), conductivity, heavy metal, dissolved oxygen (DO), and so on
The electrode, a four-terminal conductivity cell, and a three-end was distributed on the silicon chip, electrode, a four-terminal conductivity cell, and a three-end resistive temperature detector (RTD) was distributed on the silicon chip, as shown shown in inFigure
Summary
Protection of human health is one of the goals of social development, in which water plays an extremely important role. The development of industry and agriculture has resulted in water contamination as one of the unintended consequences. It is intensely demanded to construct monitoring and early warning systems for water quality. Water quality can be assessed from various aspects, through measuring many parameters, including pH, oxidation reduction potential (ORP), conductivity, heavy metal, dissolved oxygen (DO), and so on. It is cost-consuming and complicated to detect various contaminations separately. Some commercial integrated detection systems have become available [2], which mainly rely on the combination of traditional water sensors, such as bulk pH electrodes and conductivity sensors
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