Fabrication of a miniature CMOS-based optical biosensor

Abstract

This work presents a novel, miniature optical biosensor by immobilizing horseradish peroxidase (HRP) or the HRP/glucose oxidase (GOx) coupled enzyme pair on a CMOS photosensing chip with a detection area of 0.5mm×0.5mm. A highly transparent TEOS/PDMS Ormosil is used to encapsulate and immobilize enzymes on the surface of the photosensor. Interestingly, HRP-catalyzed luminol luminescence can be detected in real time on optical H2O2 and glucose biosensors. The minimum reaction volume of the developed optical biosensors is 10μL. Both optical H2O2 and glucose biosensors have an optimal operation temperature and pH of 20–25°C and pH 8.4, respectively. The linear dynamic range of optical H2O2 and glucose biosensors is 0.05–20mM H2O2 and 0.5–20mM glucose, respectively. The miniature optical glucose biosensor also exhibits good reproducibility with a relative standard deviation of 4.3%. Additionally, ascorbic acid and uric acid, two major interfering substances in the serum during electrochemical analysis, cause only slight interference with the fabricated optical glucose biosensor. In conclusion, the CMOS-photodiode-based optical biosensors proposed herein have many advantages, such as a short detection time, a small sample volume requirement, high reproducibility and wide dynamic range.