Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

Qiang Wei,Fang Lin,Xiaofan Zhang,Genqiang Chen,Hong-Xing Wang,Ruozheng Wang

doi:10.3390/ma14113006

Abstract

Two types of a trench with conventional vertical and new reverse-V-shaped cross-sections were fabricated on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser. In addition, a microwave plasma chemical vapor deposition device was used to produce multiple micrometer-sized channels using the epitaxial lateral overgrowth technique. Raman and SEM methods were applied to analyze both types of growth layer characterization. The hollowness of the microchannels was measured using an optical microscope. According to the findings, the epitaxial lateral overgrowth layer of the novel reverse-V-shaped trench produced improved SCD surface morphology and crystal quality.

Highlights

Infiltrated with ever-advancing power semiconductor devices in the third century, they played a significant role in daily life
The scanning electron microscope (SEM) images (Gemini SEM 500, Zeiss, Jena, Germany) of conventional perpendicular trenches in the diamond substrate after laser treatment are shown in Figure 2a, which shows that the trenches made by the traditional method are parallel, characterized by perfect uniformity with clearly visible borders
The SEM image of the enlarged trench cross-section after growth is shown in Figure 2d; notably, the top width decreased to 35 μm

Summary

Introduction

Infiltrated with ever-advancing power semiconductor devices in the third century, they played a significant role in daily life. The diamond semiconductor, one of the most promising materials in industrial applications, has received significant research attention in electronic process thermal management, because of its stable chemical properties, high-temperature operation, and low friction coefficient and low thermal expansion coefficient. Diamond with microchannels is an ideal substrate for cooling chip temperatures and achieving low thermal resistance [3,4,5]; enlarging surface and heat exchange areas of catalytic elements [6,7,8,9], and assisting with liquid transport as a stent in medical equipment [10,11]. Cutting trenches using a perpendicular micro-jet water-guided laser as a feasible means of fabricating a single crystal diamond (SCD) microchannel has been reported [19]; the surface quality of this type of microchannel was not improved, and defects remained. The principle of growth is shown in illustrations schematically

Experiment

Results and Discussion

Conclusions