Fabrication of a micro-tip array mold using a micro-lens mask with proximity printing

Abstract

In this study, a mold for a micro-tip array is fabricated using a microlens array mask with proximity exposure. The micro-tip array uses a microlens array mask with geometrical optics. Light passing through a microlens is focused at the focal points. There is microlens on the mask and the pattern that results from the light passing through the mask is directly projected onto the photoresist surface. A concave profile is developed using a positive photoresist and the remaining photoresist microstructures are formed after the development process. By changing the distance between the mask and the photoresist and the radius of curvature of the microlens, various tip shapes can be fabricated. The exposure gap is calculated using the microlens array mask and the geometry of the mold of micro-tip array is established using the irradiance absorption maps for the different levels. These methods respectively use the model of the positive photoresist and optical software. When electroforming a metallic micro-tip copy of the patterned photoresist, masters are created. The metal micro-tip array is used membrane probe card.