Abstract

The fabrication of an active MEMS microvalve driven by integrated bulk single crystal piezoelectric actuators is reported. The valve has a nine-layer structure composed of glass, silicon, and silicon on insulator (SOI) layers assembled by wafer-level fusion bonding and anodic bonding, as well as die-level anodic bonding and eutectic bonding. Valve head strokes as large as 20 μm were realized through hydraulic amplification of the small stroke of the piezoelectric actuator. A flow rate of 0.21 ml/s was obtained at 1 kHz. The fabrication, bonding and assembly process, as well as some test results are described.

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