Fabrication of a double-sided micro-lens array by a glass molding technique

Abstract

In recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity increases with double-sided MLAs. MLAs fabricated by glass can be used in higher temperature environments or in high-energy systems. Glass-based MLAs can be fabricated by laser machining, photolithography, precision diamond grinding process and precision glass molding (PGM) technologies, but laser machining, photolithography and precision diamond grinding process technologies are not the perfect approach for mass production. Therefore, this paper proposes a method to fabricate a mold by laser micro-machining and a double-sided MLA by a PGM process. First, a micro-hole array was fabricated on the surface of a silicon carbide mold. A double-sided MLA using two molds was then formed by a PGM process. In this paper, the PGM process parameters including molding temperature and molding force are discussed. Moreover, the profile of a double-sided MLA is discussed. Finally, a double-sided MLA with a diameter of 20 mm, and lenses with a height of 52 µm, a radius of 851 µm and a pitch of 700 µm were formed on glass.