Abstract
5-GHz-band surface acoustic wave (SAW) filters for mobile communications were fabricated on an atomically-flat-surface (0001)aluminum nitride/(0001)sapphire (AlN/Al/sub 2/O/sub 3/) combination. The SAW devices were fabricated using electron beam lithography and a lift-off method. Atomically-flat-surface AIN films were used to reduce SAW propagation loss. The center frequency of the fabricated SAW filter was 5.18 GHz. SAW velocity was 5688 m/s at normalized thickness by wave number (kH) of 9.9. The effective coupling coefficient was 0.1% and temperature-coefficient of delay was 9 ppm//spl deg/C at kH of 5.9. The SAW propagation loss was 0.0053 dB at 5.18 GHz. The atomically-flat-surface (0001)AlN/(0001)Al/sub 2/O/sub 3/ combination is promising for use in 5-GHz-band SAW filters for application to mobile communications.
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