Abstract
Microfluidic devices offer the potential to automate a wide variety of chemical and biological operations that are applicable for diagnostic and therapeutic operations with higher efficiency as well as higher repeatability and reproducibility. Polymer based microfluidic devices offer particular advantages including those of cost and biocompatibility. Here, we describe direct and replication approaches for manufacturing of polymer microfluidic devices. Replications approaches require fabrication of mould or master and we describe different methods of mould manufacture, including mechanical (micro-cutting; ultrasonic machining), energy-assisted methods (electrodischarge machining, micro-electrochemical machining, laser ablation, electron beam machining, focused ion beam (FIB) machining), traditional micro-electromechanical systems (MEMS) processes, as well as mould fabrication approaches for curved surfaces. The approaches for microfluidic device fabrications are described in terms of low volume production (casting, lamination, laser ablation, 3D printing) and high-volume production (hot embossing, injection moulding, and film or sheet operations).
Highlights
Microfluidic and micromachines have drawn significant attention since their introduction in the 1990s
We describe the methods of manufacturing of a mould or a master that can be used for high-volume replication in terms of mechanical, energy-assisted, traditional micro-electromechanical systems (MEMS) and fabrication on curved surfaces
PDMS casting on an SU-8 mould can be used for the development of microfluidic devices with multiple layers, which allows for the development of Quake-type valves [119]
Summary
Microfluidic and micromachines have drawn significant attention since their introduction in the 1990s. Much attention has focused on polymers as fabrication materials for microfluidic devices because of their unique characteristics: They are relatively cheap compared to silicon or glass in their unit area price. This characteristic is especially important for mass production or disposable usage in biomedical applications. Polyurethanes (PU) are a further important class of polymers for the development of microfluidic devices and are created by the reaction of an isocyanate group with an alcohol or polyol Both reversible and nonreversible channel creation can be achieved relatively by partial curing of the PU components. Typical replication methods include casting, hot embossing, and micro-injection moulding
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