Abstract

We designed and fabricated a rapid-single-flux-quantum T flip-flop (TFF) with high-Tc interface-engineered Josephson junctions. Y1Ba2Cu3O7−d and Sr2AlTaO6 were deposited for the superconducting layer and the insulating layer, respectively. The Josephson junction was formed through an interface treatment process using Ar ion milling and vacuum annealing. We simulated a TFF circuit and designed a physical layout using WRspice and Xic. The fabricated TFF has a minimum junction width of 3 μm. Through the measurement of the voltage divider operation, the maximum operation frequency was estimated to be 53 GHz at 22 K and 106 GHz at 12 K.

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