Fabrication and Testing of PDMS Pitch-Variable Gratings Based on Silicon Mold Technology

Abstract

A period-variable grating is designed and fabricated in this paper. The PDMS grating is replicated by method of Si mold which is fabricated by MEMS process. The grating is connected with a mechanical system which can change its pitch when a force is applied, so it can extend the grating and change the grating's period. In the diffraction experiment, about 20% extension ratio of the first diffraction order has been obtained, which will generate the change of diffraction angle of 0.096rad.