Abstract
Abstract This paper presents the fabrication and test results of an electromagnetic micro actuator for peristaltic micropumps. The actuator consists of a parylene diaphragm, spiral Cu coils and magnets. Parylene is waterproof and the Young’s modulus of it is small compared with metals or silicon and its compounds. So, it is adequate for the actuator diaphragm of a micropump. The deflection of the fabricated actuator diaphragm is measured using a laser displacement meter. The deflections of the flat and corrugated diaphragms are 20 μm and 30 μm at 1 Hz, respectively, when input current amplitude is 100 mA and duty ratio is 50%.
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