Abstract
We have fabricated free-standing structures of nanometer-scale dimensions by combining high-resolution electron beam lithography, layer growth and dry etching techniques. AuPd lines having a minimum width of 40 nm, a thickness of 10 to 40 nm, and lengths from 8 to 120 μm have been made free standing. The resistance of fine wires on a substrate as well as free-standing wires has been measured from 0.35 to 20 K. Both sets of wires show quantum corrections to the resistance. For wires on a substrate the resistance rise fits well to one-dimensional electron–electron interactions, while for the free-standing wires the resistance rise takes a new form that has not yet been explained. Below 1 K the lattice component of the thermal conductivity is expected to change as the phonon dimensionality is reduced from three to one. This contribution to the thermal conductivity can be estimated from self-heating measurements, and it is found to be three orders of magnitude smaller than predicted. In addition we have estimated the tensile strength to be an order of magnitude larger than bulk values.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
