Abstract
A new low cost high performance PMMA micropump, developed for microfluidic system, is presented. According to the orifice flow theory, a diffuser/nozzle structure is fabricated with precision milling process, and packaged with the film-sealing at the condition of thermal bonding process. The size parameter of the diffuser/nozzle structure is 2.5mm *150µm, 8° conical angle, the volume of PMMA micropump is 14×14×2.5 mm3. And experimental results show that the PMMA micropump can produce a maximum back pressure of 1906.1Pa and a maximum flow rate of 564µL/min under 220 V, 500Hz squired wave power supply.
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