Abstract
Terahertz (THz) detector indicates great potentials in detecting application because of real-time, compact bulk and unique spectral characteristics. Small dimension and integration THz detectors based on resonance cavity structure were designed and simulated to get optimizing THz detector parameters from the simulation results of membrane temperature changing. The THz detector was fabricated with complex semiconductor process and three dimension thermal variation of resonance cavity were obtained by simulation to identify the resonance cavity design. The electrical response time of THz detector could be as low as 5ms, which is suitable for the application of fast response THz detecting.
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