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Abstract
In this study, a solid-state modified pH sensor with RF magnetron sputtering technology was developed. The sensor consists of an active electrode consisting of a titanium nitride (TiN) film with a protective membrane of Nafion and a reference glass electrode of Ag/AgCl. The sensitivity of the pH sensor was investigated. Results show a sensor with excellent characteristics: sensitivity of 58.6 mV/pH for pH values from 2 to 12, very short response time of approximately 12 s in neutral pH solutions, and stability of less than 0.9 mV in 10 min duration. Further improvement in the performance of the TiN sensor was studied by application of a Nafion protective membrane. Nafion improves the sensor sensitivity close to Nernstian by maintaining a linear response. This paves the way to implement TiN with Nafion protection to block any interference species during real time applications in biosensing and medical diagnostic pH sensors.
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