Fabrication and nano-imprintabilities of Zr-, Pd- and Cu-based glassy alloy thinfilms

Abstract

With the aim of investigating nano-imprintability of glassy alloys in a film form,Zr49Al11Ni8Cu32,Pd39Cu29Ni13P19 andCu38Zr47Al9Ag6 glassy alloy thin films were fabricated on Si substrate by a magnetron sputteringmethod. These films exhibit a very smooth surface, a distinct glass transitionphenomenon and a large supercooled liquid region of about 80 K, which are suitable forimprinting materials. Moreover, thermal nano-imprintability of these obtainedfilms is demonstrated by using a dot array mold with a dot diameter of 90 nm.Surface observations revealed that periodic nano-hole arrays with a hole diameter of90 nm were successfully imprinted on the surface of these films. Among them,Pd-based glassy alloy thin film indicated more precise pattern imprintability,namely, flatter residual surface plane and sharper hole edge. It is said that theseglassy alloy thin films, especially Pd-based glassy alloy thin film, are one of thepromising materials for fabricating micro-machines and nano-devices by thermalimprinting.