Abstract
An SOI based hyperbolic paraboloid geometry capacitive micromachined ultrasonic transducer (CMUT) array has been fabricated to realize a frequency independent constant beamwidth broadband beamforming capability. Detailed fabrication and packaging techniques are presented along with measurement results on individual CMUT cells for transient and steady-state response using a Polytec laser Doppler vibrometer. The measurement results are compared with analytical and 3-D electromechanical finite element analysis using IntelliSuite™. The measured results are in excellent agreement with analytical and FEA results. Measurement results also show that the CMUTs exhibit a flat bandwidth within the specified frequency range. SEM inspection also shows very close agreement between mask features and fabricated geometry that ensures reproducibility of the device with a high degree of fidelity. The CMUT array has been designed for automotive blindspot detection application and works in the 113–167 kHz range.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
