Abstract
A series of high stacking density FeCoB-SiO2 nanoparticle films with strip structures were prepared by electric field-assisted deposition technique attached by thermal oxidization processing. We obtained the expected soft magnetic properties for strip-patterned FeCoB-SiO2 nanoparticle films. In this situation, relatively large permeability and high ferromagnetic resonance frequency are easily achieved in a wide gigahertz range. More importantly, the great GHz electromagnetic performance can be maintained in a wide SiO2 volume fraction range by carefully controlling the width of SiO2 strips. These results show that this kind of film materials have great potential for application in integrated devices operated in the gigahertz frequency range. Meanwhile, these single layer soft magnetic film materials with high permeability in the GHz range and high resistivity are easily merged into the micro manufacturing technology, such as CMOS and MEMS technique.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
