Abstract
Using a Si-based porous anodic alumina membrane as a mask,we demonstrate a way to pattern Si surface. After removing theSiO2 nanoislands formed during anodization of the Al/Si interface, we obtain a Si nanotip array on thesurface of a Si wafer. This array shows an excellent field emission property with a low turn-on fieldof 8.5 V µm−1. The Fowler–Nordheim plot obtained is linearly dependent, indicating that the emissioncurrent arises from the quantum tunnelling effect. The Si nanotip array can be expected tohave important applications in nanoelectronic devices.
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