Abstract
In this study, microcrystalline diamond (MCD)/carbon nanotube (CNT) double-layered pyramid arrays have been fabricated by microwave plasma chemical vapor deposition (MPCVD). First, the silicon template with pyramidal cavity arrays was manufactured using photolithography with anisotropic wet-etching. MCD film was then grown on the silicon template by MPCVD. After the sol–gel catalyst which contains ferric nitrate, tetrabutyl titanate and n-propanol was spun on the MCD film, CNT film was grown by MPCVD. In order to etch away the silicon template, hydrofluoric acid and nitric acid are used for 2h. From the results, the turn-on electric field of MCD/CNT double-layered pyramid arrays is about 2.84V/μm and lifetime over 100h.
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