Abstract
A micro ion drag pump with planar electrodes on a glass substrate is fabricated and tested. The pump consists of a planar electrode pair array driven by DC voltage using unipolar conduction. Ethyl alcohol is pumped in both directions, and the flow rate and the pressure are measured in channels of depth 100 μm or 200 μm and width fixed at 3 mm. It is found that the pump can be fabricated easily and at a lower cost than the micro ion drag pumps previously investigated.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
